Research on Nanotechnology
at the
University of Delaware
The effects of composition on the properties of quantum dots
Size distribution of SiGeC quantum
dots grown on Si — 311
–
and Si — 001
–
surfaces
FIG. 1. (a) Atomic force microscopy scan of 2 µm x 2µm area of Si0.1Ge0.89 grown on (311)
Si and quantum dot area distribution, (b) atomic force microscopy scan of 2 µm x 2µm area of
Si0.1Ge0.89C0.01 grown on (311) Si and quantum dot area distribution. The Curves were
normalized by multiplying the number of equally sized quantum dots with their area and dividing
the result by the scan area.

FIG. 2. Fourier intensity distribution spectrum vs. quantum dot spatial wavelength for Ge, GeC,
SiGe, and SiGeC quantum dots on Si(311) and Si(001), obtained from AFM scans of Fig. 1,
over the 2 µm x 2µm area. Markers represent measured data, solid lines were calculated by
fitting the measured data to an exponentially altered Gaussian.
Last Updated August 22, 2001
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