1

2

3

4

5

6

7

6,501,589

Article comprising a metallic anti-mirror

8

6,485,996

Method of making wafer having top and bottom emitting vertical-cavity lasers

9

6,458,411

Method of making a mechanically compliant bump

10

6,444,491

Composite semiconductor devices and method for manufacture thereof

11

6,434,726

System and method of transmission using coplanar bond wires

12

6,424,450

Optical modulator having low insertion loss and wide bandwidth

13

6,388,322

Article comprising a mechanically compliant bump

14

6,337,753

Optical power equalizer

15

6,321,010

Optical microstructure and method of manufacture

16

6,307,983

Robotic optical cross-connect

17

6,307,691

Optical filter and method for linearization of optical power equalizer

18

6,277,668

Optical detector for minimizing optical crosstalk

19

6,271,943

Wavelength demultiplexing stack photodiode detector with electrical isolation layers

20

6,258,616

Method of making a semiconductor device having a non-alloyed ohmic contact to a buried doped layer

21

6,222,206

Wafer having top and bottom emitting vertical-cavity lasers

22

6,172,417

Integrated semiconductor devices

23

6,169,833

CMOS-compatible optical bench

24

6,159,760

Method of fabricating oxide-aperture vertical cavity surface emitting lasers

25

6,048,751

Process for manufacture of composite semiconductor devices

26

6,034,431

Electronic integrated circuit with optical inputs and outputs

27

6,005,262

Flip-chip bonded VCSEL CMOS circuit with silicon monitor detector

28

6,002,513

Optical modulator providing independent control of attenuation and spectral tilt

29

5,996,221

Method for thermocompression bonding structures

30

5,977,571

Low loss connecting arrangement for photodiodes

31

5,975,408

Solder bonding of electrical components

32

5,962,846

Redundant linear detection arrays

33

5,949,571

Mars optical modulators

34

5,949,561

Wavelength demultiplexing multiple quantum well photodetector

35

5,943,158

Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method

36

5,943,155

Mars optical modulators

37

5,940,723

Heteroepitaxial growth of III-V materials

38

5,923,951

Method of making a flip-chip bonded GaAs-based opto -electronic device

39

5,918,794

Solder bonding of dense arrays of microminiature contact pads

40

5,914,804

Double-cavity micromechanical optical modulator with plural multilayer mirrors

41

5,900,983

Level-setting optical attenuator

42

5,897,333

Method for forming integrated composite semiconductor devices

43

5,872,016

Process of making an optoelectronic devices utilizing multiple quantum well pin structures

44

5,870,221

Micromechanical modulator having enhanced performance

45

5,858,814

Hybrid chip and method therefor

46

5,838,484

Micromechanical optical modulator with linear operating characteristic

47

5,825,528

Phase-mismatched fabry-perot cavity micromechanical modulator

48

5,786,925

Method and composition for arbitrary angle mirrors in substrates for use in hybrid optical systems

49

5,784,187

Wafer level integration of an optical modulator and III-V photodetector

50

5,767,997

Method and arrangement for a combined modulator/photodetector

51

5,735,950

Method for producing a precise alloy composition from input variables under nonlinear incorporation conditions

52

5,710,656

Micromechanical optical modulator having a reduced-mass composite membrane

53

5,698,452

Method of making integrated detector/ photoemitter with non-imaging director

54

5,668,023

Composition for off-axis growth sites on non-polar substrates

55

5,654,819

Micromechanical modulator

56

5,636,052

Direct view display based on a micromechanical modulation

57

5,631,472

Accurate in-situ lattice matching by reflection high energy electron diffraction

58

5,627,383

Optoelectronic devices utilizing multiple quantum well pin structures

59

5,625,733

Arrangement for interconnecting an optical fiber to an optical component

60

5,589,974

Micromechanical modulator

61

5,589,404

Monolithically integrated VLSI optoelectronic circuits and a method of fabricating the same

62

5,578,162

Integrated composite semiconductor devices and method for manufacture thereof

63

5,573,975

Surface-normal semiconductor optical cavity devices

64

5,510,291

Method of making surface-normal semiconductor optical cavity device

65

5,510,277

Surface treatment for silicon substrates

66

5,500,761

Micromechanical modulator

67

5,480,813

Accurate in-situ lattice matching by reflection high energy electron diffraction

68

5,468,689

Method for preparation of silicon nitride gallium diffusion barrier for use in molecular beam epitaxial growth of gallium arsenide

69

5,444,270

Surface-normal semiconductor optical cavity devices with antireflective layers

70

5,443,685

Composition and method for off-axis growth sites on nonpolar substrates

71

5,385,632

Method for manufacturing integrated semiconductor devices

72

5,329,136

Voltage-tunable photodetector

73

5,210,428

Semiconductor device having shallow quantum well region

74

5,170,455

Optical connective device

75

5,093,695

Controllable semiconductor modulator having interleaved contacts

76

5,013,685

Method of making a non-alloyed ohmic contact to III-V semiconductors-on-silicon

4,904,859

Self electrooptic effect device employing asymmetric quantum wells

78

5,605,856

Method for designing an electronic integrated circuit with optical inputs and outputs