University of Delaware - College of Engineering

Research Centers & Facilities


Return to Research Overview

Nanofabrication Facility

Capabilities & Equipment

Our nanofabrication facility is equipped with state-of-the-art capabilities for Deposition/Growth (MBE, CVD), Photolithography (Ebeam, UV, DUV), Etching (ICP, RIE), and Packaging.

Sample opto-electronic devices built and integrated in our facility are shown below.


View slide show

For more details, please review our equipment (listed to the right) and view the slide slow.”

Capabilities & Equipment


Bookmark and Share