University of Delaware - College of Engineering
ELECTRICAL & COMPUTER ENGINEERING

Research Centers & Facilities

 

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Nanofabrication Facility

Capabilities & Equipment

Our nanofabrication facility is equipped with state-of-the-art capabilities for Deposition/Growth (MBE, CVD), Photolithography (Ebeam, UV, DUV), Etching (ICP, RIE), and Packaging.

Sample opto-electronic devices built and integrated in our facility are shown below.

 

View slide show

For more details, please review our equipment (listed to the right) and view the slide slow.”

 


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